With research and development centers in North America and Europe, and sales and service operations in over 50 countries, FEI brings sub-Ångström resolutions for analysis and modification to a global audience. The company's history reflects its core focus on real-world innovation.
2006
- FEI releases Quanta 3D FEG
2005
- FEI's Nova NanoSEM immersion FEG achieves 1.5 nm resolution in low vacuum mode
- FEI Introduces the Titan™ 80-300 kV TEM, the world's most powerful, commercially-available transmission electron microscope.
2004
- FEI breaks the 1 Ångström barrier with a 200 kV Tecnai™ with monochromator and Cs correction.
2003
- FEI introduces Quanta 3D - the industry's first DualBeam with low-vac SEM
- FEI acquires Revise Inc.
- FEI acquires Emispec (ESVision).
2001
- FEI launches its Quanta family of ESEMs.
- FEI introduces application-specific DualBeam™ systems for labs.
- First monochromator TEM.
2000
- First small-stage DualBeam™ launched.
1999
- FEI introduces sample stage capable of heating to 1500C
- FEI acquires Micrion Corporation and integrates product lines and operations.
1998
- FEI and Micrion separately offer head trimming solution for data storage manufacturing applications.
- All-in-one TEM (Tecnai) launched.
1997
- FEI and Philips Electron Optics merge.
- First in-line DualBeam™ for wafer fab shipped.
1996
- 5000th LMI source shipped by FEI.
- Philips purchases ElectroScan.
- Micrion releases its 8000 Series FIB for IC mask repair.
- Philips Electron Optics acquires ElectroScan and its ESEM technology.
- Philips Electron Optics acquires Delmi in Brno, Czech Republic.
1995
- FEI ships 100th FIB workstation.
- ElectroScan introduces the world's first Field Emission ESEM
1994
- ElectroScan's 2020 achieves 4 nm resolution
1993
- The first DualBeam™ (FIB/SEM) workstation is produced by FEI and Philips Electron Optics.
1990
- Philips Electron Optics introduces SEM for 6-inch semiconductor wafers.
1989
- ElectroScan introduces the world's first Environmental SEM (ESEM)
1988
- FEI ships the first complete ion beam (FIB) workstation.
1985
- Micrion ships its first system
1983
- FEI ships first electrostatically focused electron column.
- Micrion is founded to develop ion beam systems for mask repair.
1982
- FEI ships first LMI focusing column.
1981
- Liquid metal ion (LMI) sources are developed by FEI.
1971
- FEI is founded to provide high-purity, oriented single crystal materials for field emission research.
1958
- Philips Electron Optics breaks the 10 Ångström-barrier on a TEM with an EM200.
1949
- Philips Electron Optics (part of FEI Company since 1997) was one of the first companies to start volume production of transmission electron microscopes.