Focused ion beam (FIB) sample preparation for transmission electron microscopy (TEM), or any other sample modification that uses a finely focused beam of gallium ions operated at low-beam currents for imaging and high-beam currents for site-specific milling, utilizes the best sample preparation techniques in current materials science practices.
FIB is inherently site-specific, delivering precise beam placement at the area of interest. Further, FIB is able to section metals and alloys, composite materials or organic materials rapidly. FEI's DualBeams™ offer high-throughput sample preparation, automation for creation of multiple samples and real-time cross section monitoring with the SEM to assure creation of the highest quality TEM samples. Combining the electron or ion beam with either a gas or materials catalyst enables materials etching or deposition at nanoscale and deposited material can be combined with probing for direct electrical measurements.
FEI systems for preparing materials and samples includes the following: