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Imaging and Analysis Tools

Get to data. Faster. Use the world's finest suite of integrated tools for the semiconductor lab.

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Semiconductor & Data Storage

Get to market and ramp to volume, with higher yields. Faster.

Semiconductor & Data Storage

For semiconductor labs, and for fabs and labs in the data storage and MEMS markets, users can get to data faster, with the world's finest, most flexible suite of integrated imaging and analysis tools from FEI. Getting higher-quality data, faster, speeds up time-to-market and time-to-volume, while enhancing yields.

As process geometries shrink, the demands mount to increase yield, reduce cost, and accelerate time to volume. The need to adopt new tools and methodologies for finding and analyzing structures and defects is urgent, and reliable, high-quality 3D characterization and metrology are critical.

Critical process data should be available in hours, not days. The superior products, quality of results and technology leadership from FEI can be trusted to help electronics companies accelerate their efforts to get to market and ramp to volume, with higher yields. Faster.

Applications

Learn more about semiconductor and data storage applications typically performed with FEI systems and tools:

Specialty Tools

Browse FEI tools specially designed for semiconductor, data storage, and MEMS applications:

FEI Connectivity Solutions - an innovative new process that links the operations of sample preparation, lift-out, transfer, and loading of ultra-thin TEM lamellae for imaging and analysis.

Learn more

Focused Ion Beam Technology, Capabilities and Applications View [PDF 685KB]
Particle Induced X-ray Analysis Using FIBs View [PDF 2.2MB]
DualBeam™ Milling and Deposition of Complex Structures Using Bitmap Files and Digital Patterning View [PDF 464KB]

Tools for Nanotech

Explore FEI product families with models used in semiconductor and data storage applications:

Nova Family 
Nova Family of Tools for Semiconductor Labs View [PDF 356KB]
Quanta Family 
Quanta™ DualBeam™ and SEM Family for Sample Imaging in Semi Labs View [PDF 346KB]
Helios NanoLab Family 
Helios NanoLab™ Sub-nanometer field emission SEM meets next generation FIB View [PDF 170KB]
Tecnai Family 
Tecnai™ S/TEM Family for Imaging, Analysis and Characterization View [PDF 304KB]
Titan Family 
Titan™ S/TEM Family The World’s Most Advanced S/TEM Solutions View [PDF 388KB]