Components
Leading the world in thermal field emission sources, single lens electron sources, UHV FIB columns, UHV SEM columns and beam delivery systems, FEI component products deliver a cutting-edge performance in charged particle optics.
Emission, electron and ion source products include single crystal tungsten, thermal field Schottky electron emitters and liquid metal ion sources (LMIS).
FEI offers cutting-edge UHV FIB columns and beam delivery systems for advanced materials research and surface science applications.
For advance imaging and surface analysis, FEI provides two lens, electrostatic, high-resolution UHV compatible SEM columns and beam delivery systems.
FEI custom-builds single lens Schottky field emission electrostatic electron sources for a variety of OEM applications.
Applications with FEI Component Products
- CD-SEM
- Direct write electron beam lithography
- Electron beam defect review
- Electron beam defect inspection
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- High resolution UHV SEM imaging
- SPM probe positioning
- SIMS and TOF-SIMS
- Auger analysis
- Depth profiling
- FIB surface modification
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